Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/E1 furnace break-down voltage measurement results: Difference between revisions
| Line 31: | Line 31: | ||
|- | |- | ||
|} | |} | ||
<i>The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.<i> | |||
Latest revision as of 12:53, 16 September 2025
Breakdown voltage results for the E1 8" Oxidation furnace
Dry oxidation
| Date | Oxidation recipe | Oxide thickness | Absolute break-down voltage | Relative break-down voltage
= Absolute break-down voltage/oxide thickness |
| February 2022 | DRY1050 | 117 nm |  |
 |
| November 2023 | DRY1100 | 510 nm |  |
 |
| April 2025 | DRY1050 | 115 nm |  |
 |
The break-down voltage measurements have been made with help from Kitty Steenberg and Rune Sixten Grass from DTU Health Tech.