Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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! BHF | ! width="200" | BHF | ||
! Cold RCA1 | ! width="200" | Cold RCA1 | ||
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|'''General description''' | |'''General description''' | ||
| | | Etch of titanium with or without photoresist mask. | ||
Etch of titanium with or without photoresist mask. | | Etch of titanium (as stripper or with eagle resist). | ||
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Etch of titanium (as stripper or with eagle resist). | |||
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|'''Chemical solution''' | |'''Chemical solution''' | ||
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== Dry etching of titanium == | == Dry etching of titanium == | ||
See the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] page. | See the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] page. | ||