Specific Process Knowledge/Etch/Etching of Chromium: Difference between revisions
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== | ==Wet etching of Chromium== | ||
[[Image:fumehoodetch-chrom.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Chromium can take place in a beaker in this fume hood]] | [[Image:fumehoodetch-chrom.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Chromium can take place in a beaker in this fume hood]] | ||
Wet etching of chromium at Danchip is done making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. We have two solution for this: | |||
# HNO<math>_3</math>:H<math>_2</math>O:cerisulphate - 90ml:1200ml:15g - standard at Danchip | # HNO<math>_3</math>:H<math>_2</math>O:cerisulphate - 90ml:1200ml:15g - standard at Danchip | ||
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== Dry etching of chromium == | |||
On the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] tool a recipe for chromium is being developed. | |||