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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,518 edits
Line 609: Line 609:
| 2
| 2
|rowspan="2"| 1.5 µm
|rowspan="2"| 1.5 µm
|rowspan="2"| Dev: SP60s
|rowspan="2"| Dev: SP60s<br>See QC data for latest values
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Pneumatic
| Pneumatic
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