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Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions

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==Etching of Titanium==
==Wet etching of Titanium==
[[Image:Fumehoodetch-chrom2.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Titanium can take place in this pp tank or in a beaker in this fume hood]]
[[Image:Fumehoodetch-chrom2.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Titanium can take place in this pp tank or in a beaker in this fume hood]]


Etching of Titanium is done wet at Danchip. We have two solutions for titanium etching:
We have two solutions for wet titanium etching:
    
    
# BHF  
# BHF  
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== Dry etching of titanium ==
See the [[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal Etch]] page.