Specific Process Knowledge/Lithography/EBeamLithography/ResistBottles: Difference between revisions
Created page with "= User resist bottles in the cleanroom = 150px|right We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. Please follow the guidelines below. * Find a blue-capped glass bottle in the cupboard next to office 055 in 346 (outside the cleanroom). * Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol * Bring the bottle to a fumehood inside the cleanroom; clean the b..." |
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* Find a blue-capped glass bottle in the cupboard next to office 055 in 346 (outside the cleanroom). | * Find a blue-capped glass bottle in the cupboard next to office 055 in 346 (outside the cleanroom). | ||
* Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | * Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol | ||
* Bring the bottle to a fumehood inside the cleanroom; clean the bottle and the lid thoroughly '''on the inside''' with the main solvent of your resist, i.e. for CSAR use anisole. If in doubt which solvent your e-beam resist contains, consult the MSDS of the resist found [http://kemibrug.dk | * Bring the bottle to a fumehood inside the cleanroom; clean the bottle and the lid thoroughly '''on the inside''' with the main solvent of your resist, i.e. for CSAR use anisole. If in doubt which solvent your e-beam resist contains, consult the MSDS of the resist found [http://kemibrug.dk/ here]. | ||
* If you need to dilute the resist, find a measurement beaker and clean it thoroughly in same solvent as your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fumehood in E-4. | * If you need to dilute the resist, find a measurement beaker and clean it thoroughly in same solvent as your own bottle. For CSAR, ZEP, mr EBL, and anisole-based PMMA, you can use the measurement beaker in the box inside the fumehood in E-4. | ||
* Let the bottle dry in the fumehood. | * Let the bottle dry in the fumehood. | ||
