Specific Process Knowledge/Lithography/EBeamLithography/HSQ Dose Test: Difference between revisions
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<p style="color:red;">This page is currently under construction.</p> | <p style="color:red;">This page is currently under construction.</p> | ||
HSQ Dose Test | |||
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** Optical and SEM images and analysis | ** Optical and SEM images and analysis | ||
= Results = | |||
Below is overview optical images of the developed pattern: | Below is overview optical images of the developed pattern: | ||
[[File:Dose test optical.png|frameless|625x625px|dose test optical images|left]] | [[File:Dose test optical.png|frameless|625x625px|dose test optical images|left]] | ||