Specific Process Knowledge/Lithography/EBeamLithography/HSQ Dose Test: Difference between revisions
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== Results == | == Results == | ||
Below is overview optical images of the developed pattern: | Below is overview optical images of the developed pattern: | ||
[[File:Dose test optical.png|frameless|625x625px|dose test optical images|left]] | [[File:Dose test optical.png|frameless|625x625px|dose test optical images|left]]<br> | ||
SEM images were recorded and analyzed from the structure shown below: | SEM images were recorded and analyzed from the structure shown below: | ||