Specific Process Knowledge/Etch/Titanium Oxide: Difference between revisions
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!Generel description | !Generel description | ||
|Wet etch of TiO2 (ALD) | |Wet etch of TiO2 (ALD) | ||
| | |Dry etch of TiO2 | ||
|- | |- | ||
Bghe (talk | contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators 7,318 edits |
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| Line 26: | Line 26: | ||
!Generel description | !Generel description | ||
|Wet etch of TiO2 (ALD) | |Wet etch of TiO2 (ALD) | ||
| | |Dry etch of TiO2 | ||
|- | |- | ||