Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By Peixiong: Difference between revisions
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<br> {{CC-bghe1}} <br> | <br> {{CC-bghe1}} <br> | ||
=With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)= | =With C4F8 and H2 chemistry (all tests done by Peixiong Shi, DTU Nanolab)= | ||
APOX refers to a thick SiO2 grown | APOX refers to a thick SiO2 grown on a silicon wafer in a wet thermal process at high temperature. | ||
==Part 1== | ==Part 1== | ||