Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V == | ==Ellipsometer RC2, Ellipsometer M2000XI (VASE) and Ellipsometer M-2000V == | ||
''This section is written by Berit Herstrøm @ DTU Nanolab'' | ''This section is written by Berit Herstrøm @ DTU Nanolab'' | ||
[[image:RC2 system.jpg|275x275px|right|thumb|Ellipsometer RC2: positioned in cleanroom A-1, {{photo1}}]] | |||
[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]] | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]] | ||