Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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===Thickness measurement, deposition rate and process control=== | ===Thickness measurement, deposition rate and process control=== | ||
How the machine measures the thickness of the growing film using a quartz crystal monitor, how accurately is the control of the rate/thickness, and other useful information about e-beam deposition is found here: [[/Good to know about the Temescal#Deposition rate and thickness measurement accuracy|Thickness, rate, process control]]. | |||
===Particulates in the films=== | ===Particulates in the films=== | ||