Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Difference between revisions
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== E-beam evaporation of Tantalum == | == E-beam evaporation of Tantalum == | ||
Tantalum can be deposited by e-beam | Tantalum can be deposited by e-beam evaporation in our two Temescal tools. | ||
*[[/Ta Ebeam evaporation in Temescal |E-beam evaporation of Ta in Temescal]] | *[[/Ta Ebeam evaporation in Temescal |E-beam evaporation of Ta in Temescal]] | ||