Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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[[/Acceptance Test|Acceptance Test information is found here]]. Describes '''thickness uniformity''' tests, '''side wall deposition''' tests, '''sheet resistance''' tests and tests of the '''ion source''' for substrate cleaning. | [[/Acceptance Test|Acceptance Test information is found here]]. Describes '''thickness uniformity''' tests, '''side wall deposition''' tests, '''sheet resistance''' tests and tests of the '''ion source''' for substrate cleaning. | ||
===Materials for e-beam evaporation in the E-beam evaporator (Temescal)=== | |||
[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]<br> | [[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]<br> | ||