Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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====Materials for e-beam evaporation in the E-beam evaporator (Temescal)==== | ====Materials for e-beam evaporation in the E-beam evaporator (Temescal)==== | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Aluminium|Aluminium (Al)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium|Chromium (Cr)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Chromium|Chromium (Cr)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Copper|Copper (Cu)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Copper|Copper (Cu)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Germanium|Germanium (Ge)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Germanium|Germanium (Ge)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Gold|Gold (Au)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Gold|Gold (Au)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum|Molybdenum (Mo)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Nickel|Nickel (Ni)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Niobium|Niobium (Nb)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Niobium|Niobium (Nb)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Palladium|Palladium (Pd)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Platinum|Platinum (Pt)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Silver|Silver (Ag)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Silver|Silver (Ag)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Tantalum|Tantalum (Ta)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Tantalum|Tantalum (Ta)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Tin|Tin (Sn)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Tin|Tin (Sn)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Titanium|Titanium (Ti)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Titanium|Titanium (Ti)]]<br> | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]] | [[Specific Process Knowledge/Thin film deposition/Deposition of Tungsten|Tungsten (W)]]<br> | ||
All the above materials can be deposited with the E-beam Evaporator Temescal, although Sn is not recommended - we found sputtering worked better for that. | All the above materials can be deposited with the E-beam Evaporator Temescal, although Sn is not recommended - we found sputtering worked better for that. | ||