Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Difference between revisions

Jml (talk | contribs)
No edit summary
Jml (talk | contribs)
No edit summary
Line 7: Line 7:
|-
|-
! Etch rate (µm/min)   
! Etch rate (µm/min)   
| > 15
| Not specified
| 18.9
| 18.9
|-
|-