Specific Process Knowledge/Pattern Design/CleWin: Difference between revisions
Appearance
No edit summary |
No edit summary |
||
| Line 24: | Line 24: | ||
Alternatively an installer can be downloaded from the cleanroom drive (''typically mapped as O:\ drive''): <br> | Alternatively an installer can be downloaded from the cleanroom drive (''typically mapped as O:\ drive''): <br> | ||
\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software\ | <code>\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software\</code> <br> | ||
or <br> | |||
<code>U:\Nlab\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software</code> | |||
Please copy the zip-file to your local drive, extract it and run the installation program '''CleWin6_64bit_evaluation_setup.exe''' (''as administrator''). After installation, start the program Clewin 6. | Please copy the zip-file to your local drive, extract it and run the installation program '''CleWin6_64bit_evaluation_setup.exe''' (''as administrator''). After installation, start the program Clewin 6. | ||