Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions
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The dimension is given in nanometer. In the example the actual command is | The dimension is given in nanometer. In the example the actual command is | ||
'''ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000''' | '''ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000''' | ||
This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | ||
'''ebimg mkref inputimage.tiff outputimage.ref.gz''' | '''ebimg mkref inputimage.tiff outputimage.ref.gz''' | ||
In our case it will be | In our case it will be | ||
'''ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz''' | '''ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz''' | ||
This will generate the actual reference image file with the correct scaling. This file should be moved to | This will generate the actual reference image file with the correct scaling. This file should be moved to | ||
'''/home/eb0/jeoleb/prm/mark''' | '''/home/eb0/jeoleb/prm/mark''' | ||