Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions

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 Gain settings used for image scan. Unlike the usual "Cross mark" scan type, the "SE" detector is now available for alignment.
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-{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;"
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-| [[image:2Droughscan.png|400px]] || [[image:2Dfinescan.png|400px]]
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-Imagescans obtained during alignment. Rough alignment scan (left) is 1000 µm while fine scan (right) is 10 µm. The green cross indicates the center as determined by the system.
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