Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions
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The system must know the scale of the mark it is looking for, hence one must assign a physical dimension to the reference mark. The reference image must also be converted to a TIFF image. Both dimension assignment and conversion to TIFF is done with a command in a terminal window. In this example the actual mark is 1000 x 1000 µm and the input image is a PNG file called "PQRef1000mu.png". The command is: | The system must know the scale of the mark it is looking for, hence one must assign a physical dimension to the reference mark. The reference image must also be converted to a TIFF image. Both dimension assignment and conversion to TIFF is done with a command in a terminal window. In this example the actual mark is 1000 x 1000 µm and the input image is a PNG file called "PQRef1000mu.png". The command is: | ||
ebimg setsize inputimage.png outputimage.tiff dimension | '''ebimg setsize inputimage.png outputimage.tiff dimension''' | ||
The dimension is given in nanometer. In the example the actual command is | The dimension is given in nanometer. In the example the actual command is | ||
ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000 | '''ebimg setsize PQRef1000mu.png PQRef1000mu.tiff 1000000''' | ||
This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | This will generate a TIFF file with a scale of 1000 µm. Next, this must be converted with yet another command to a .ref.gz file. The command is | ||
ebimg mkref inputimage.tiff outputimage.ref.gz | '''ebimg mkref inputimage.tiff outputimage.ref.gz''' | ||
In our case it will be | In our case it will be | ||
ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz | '''ebimg mkref PQRef1000mu.tiff PQRef1000mu.ref.gz''' | ||
This will generate the actual reference image file with the correct scaling. This file should be moved to | This will generate the actual reference image file with the correct scaling. This file should be moved to | ||
'''/home/eb0/jeoleb/prm/mark''' | |||
== SETWFR and CHIPAL setup == | |||
The alignment procedure is setup using the same subprograms as usual. The only difference is that we select a different scan type. Thus, in "Scan Condition Settings" window, in the "Scan Type" pane, we select "Arbitrary shape". This enables the "2D" pane of the settings window. | |||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | |||
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| [[image:scantype.png|400px]] || [[image:2Dpane.png|400px]] | |||
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| colspan="2" style="text-align:enter;| | |||
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