Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | ||
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== System overview == | == System overview == | ||
[[File:RaithHolders.jpg|800px|thumb|4 inch wafer holder and 100 mm Universal Sample Holder (USH)]] | [[File:RaithHolders.jpg|800px|thumb|4 inch wafer holder and 100 mm Universal Sample Holder (USH)]] | ||