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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions

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<nowiki>*</nowiki> Due to recent oscillations on the QC nitride recipe (HF), new tests were performed. Learn more about it under [[Deposition of SiN with PECVD4/NEW TESTS QC|NEW TESTS QC]] . (Still under construction)
<nowiki>*</nowiki> Due to recent oscillations on the QC nitride recipe (HF), new tests were performed. Learn more about it under [[Deposition of SiN with PECVD4/NEW TESTS QC|NEW TESTS QC]] . (Still under development.)




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