Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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= The DRIE Pegasus at Danchip = | = The DRIE Pegasus at Danchip = | ||
The DRIE Pegasus is a state-of-art silicon dry etcher. It offers outstanding performance in terms of etch rate, uniformity etc. This page will provide some clues. | The DRIE Pegasus is a state-of-art silicon dry etcher. It offers outstanding performance in terms of etch rate, uniformity etc. This page will provide some clues. | ||
==The Bosch process in the DRIE-Pegasus== | ==The Bosch process in the DRIE-Pegasus== | ||