Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
Appearance
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! Cycles | ! Cycles | ||
| colspan="2" | 11 | | colspan="2" | 11 (keep fixed) | ||
| colspan="2" | 44 | | colspan="2" | 44 (vary this) | ||
|- | |- | ||
! Common | ! Common | ||