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Specific Process Knowledge/Thin film deposition/Deposition of NbTi: Difference between revisions

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Tag: Manual revert
 
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Users can deposit NbTi in either the Sputter-System (Lesker) or the Sputter-System Metal-Nitride(PC3) (Preferable option)
Users can deposit NbTi in either the Sputter-System (Lesker) or the Sputter-System Metal-Nitride(PC3) (Preferable option)


* [[Specific Process Knowledge/Thin film deposition/Deposition of NbTi/Deposition of NbTi in Sputter-System Metal-Nitride PC3/|Deposition of NbTi in Sputter-System Metal-Nitride(PC3)]]
* [[Specific Process Knowledge/Thin film deposition/Deposition of NbTi/Deposition of NbTi in Sputter-System Metal-Nitride PC3|Deposition of NbTi in Sputter-System Metal-Nitride(PC3)]]


==Comparison of sputter systems for alloy deposition==
==Comparison of sputter systems for alloy deposition==
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