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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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: The main step etches bulk aluminium.  
: The main step etches bulk aluminium.  


{| border="2" cellpadding="2" cellspacing="1"  
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Al etch'''
|+ '''Al etch'''
|-
|-
! rowspan="2" align="center"| Parameter
! rowspan="2" | Parameter
! colspan="2" align="center"| Process step
! colspan="2" | Process step
|-
|-
! width="200" | Breakthrough
! width="200" | Breakthrough
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|-
|-
|}
|}


=== Titanium etch ===
=== Titanium etch ===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher"