Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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! colspan="2" align="center"| Step 2 | ! colspan="2" align="center"| Step 2 | ||
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! Parameter | ! width="200 | Parameter | ||
! width="200 | Etch | ! width="200 | Etch | ||
! width="200 | Dep | ! width="200 | Dep | ||