Specific Process Knowledge/Thin film deposition/ALD Picosun R200: Difference between revisions
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== Process information == | == Process information == | ||
=== Recipes === | |||
*[[/Standard recipes on the ALD tool|Standard recipes on the ALD 1 tool]] | *[[/Standard recipes on the ALD tool|Standard recipes on the ALD 1 tool]] | ||
*[[/ALD multilayers|Advanced recipes involving fabrication of multilayers]] | *[[/ALD multilayers|Advanced recipes involving fabrication of multilayers]] | ||
=== Process details === | |||
*[[/Al2O3 deposition using ALD|Al<sub>2</sub>O<sub>3</sub> deposition using ALD 1]] | *[[/Al2O3 deposition using ALD|Al<sub>2</sub>O<sub>3</sub> deposition using ALD 1]] | ||
*[[/TiO2 deposition using ALD|TiO<sub>2</sub> deposition using ALD 1]] | *[[/TiO2 deposition using ALD|TiO<sub>2</sub> deposition using ALD 1]] | ||