Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions
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Atomic Layer deposition of AZO is a well-known method, where high uniformity coverage (aspect ratio over 100) can be achieved. | Atomic Layer deposition of AZO is a well-known method, where high uniformity coverage (aspect ratio over 100) can be achieved. | ||
*[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD|AZO]] | *[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD|ALD deposition of AZO]] | ||
==Sputtering of AZO== | ==Sputtering of AZO== | ||