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Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions

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In the chart below, you can compare the different deposition equipment available here at Nanolab:
In the chart below, you can compare the different deposition equipment available here at Nanolab:


*[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD|AZO]]


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