Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
New page: Aluminium can be deposited by e-beam evaporation, by sputter and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. {|... |
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| Deposition rate | | Deposition rate | ||
|2Å/s | |2Å/s to 15Å/s | ||
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