Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]] | [[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]] | ||
== User manuals == | |||
* The Danchip user manual from LabManager is found [http://labmanager.danchip.dtu.dk/machine/machine_item.php?refpage=machlist&id=265 >Here<]. | |||
* The user manual provided by SPTS can be found here [[Media:SPTS Pegasus user manual.pdf|>HERE<]] | |||
=== Hardware information === | |||
[[Media:Pegasus_sheet_V8.pdf |Hardware Information - Overview]]. | |||
[[Media:Pegasus_specification_v2.4.pdf|Hardware Information - Detailed]]. | |||
[[Media:Pegasus_System_Description_&_Differentiation.pdf|The Advantages the Pegasus has over existing Si etchers]]. | |||
[[Media:Macs_v2.pdf|Robot Handling System Information ]]. | |||
=== Process applications === | |||
[[Media:Pegasus_AcceptanceTest.pdf|The acceptance test for the DRIE-Pegasus system, April 2010]]. | |||
[[Media:Aerospace.pdf |MEMS in Aerospace]]. | |||
[[Media:Bio-medical.pdf|Bio Medical]]. | |||
[[Media:Energy.pdf|MEMS in Energy]]. | |||
[[Media:Nanotechnology.pdf|Nanotechnology]]. | |||
[[Media:Packaging-etch.pdf |Packaging Applications]]. | |||
[[Media:Appl-sheets-4_markets.pdf|General Applications]]. | |||
Further info: | Further info: | ||