Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions
| Line 30: | Line 30: | ||
!Pre-clean | !Pre-clean | ||
|Ar ion bombardment | |Ar ion bombardment | ||
| | |none | ||
|RF Ar clean | |RF Ar clean | ||
| Line 30: | Line 30: | ||
!Pre-clean | !Pre-clean | ||
|Ar ion bombardment | |Ar ion bombardment | ||
| | |none | ||
|RF Ar clean | |RF Ar clean | ||