Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty: Difference between revisions
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=Stylus Profiler Measurement Accuracy= | =Stylus Profiler Measurement Accuracy= | ||
The accuracy of a height measurement with the profiler depends on the measurement settings, the sample, the instrument calibration and the resolution. | The accuracy of a height measurement with the profiler depends on the measurement settings, the sample, the step or trench shape and height, the instrument calibration, and the resolution. | ||
==Optimal Measurement Settings== | ==Optimal Measurement Settings== | ||