Specific Process Knowledge/Characterization/Dektak XTA: Difference between revisions
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=Dektak XTA (Stylus Profiler)= | =Dektak XTA (Stylus Profiler)= | ||
[[image:Dektak XTA new.JPG|275x275px|right|thumb|Dektak XTA. Now in cleanroom C-1, at time of photo it was somewhere else.]] | |||
The Dektak XTA stylus profiler from Brüker is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions. | The Dektak XTA stylus profiler from Brüker is used for profiling surfaces of samples with structures in the micro- and nanometer range. The size of the structures that can be measured is limited by the tip dimensions. | ||
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A profile measurement can be done across a specific structure by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films can be done by measuring the wafer bow. However, for predefined measurement programs or stress measurements, we recommend the [[Specific_Process_Knowledge/Characterization/Tencor_P17|P17 profiler]]. | A profile measurement can be done across a specific structure by using a high magnification camera to locate the structure. It is also possible to program the stylus to measure in several positions, defined with respect to some deskew points. [[Specific_Process_Knowledge/Characterization/Stress_measurement|Stress measurements]] of thin films can be done by measuring the wafer bow. However, for predefined measurement programs or stress measurements, we recommend the [[Specific_Process_Knowledge/Characterization/Tencor_P17|P17 profiler]]. | ||
The user manual, quality control procedure and results, technical information and contact information can be found in [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=304 '''LabManager''']. | |||
The user manual, quality control procedure and results, technical information and contact information can be found in [http://labmanager. | |||
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Information on measurement accuracy and reproducibility for the stylus profilers may be found [[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|here]] | Information on measurement accuracy and reproducibility for the stylus profilers may be found [[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|here]]. | ||
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==Performance and Process Parameters== | ==Performance and Process Parameters== | ||
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