Specific Process Knowledge/Characterization/Dektak XTA: Difference between revisions
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*5 µm 45<sup>o</sup> cone | *5 µm 45<sup>o</sup> cone | ||
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!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates | !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates and films | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Up to 6" | *Up to 6" | ||
|- | |- | ||
| style="background:LightGrey; color:black"| | | style="background:LightGrey; color:black"|Materials allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*All materials that do not stick to the tip or leave residues | *All materials that do not stick to the tip or leave residues | ||