Specific Process Knowledge/Characterization/Dektak XTA: Difference between revisions
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step | ~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step ''for well-defined steps that are easy to measure.'' [[Specific Process Knowledge/Characterization/Stylus Profiler Measurement Uncertainty|More info here]] | ||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||