Specific Process Knowledge/Wafer Information: Difference between revisions
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In the gowning, used but cleaned single wafer carriers and wafer boxes can be found. Those have been washed in the dishwasher with special soap and deionized water and air dried. | In the gowning, used but cleaned single wafer carriers and wafer boxes can be found. Those have been washed in the dishwasher with special soap and deionized water and air dried. | ||
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Please note, while those are considered (mostly) clean, they are not clean enough to be used as carrier for transport of wafers between RCA and furnace or between furnaces. | {| border="2" style="border: dashed 2px #BB0003" cellspacing="0" cellpadding="10" align="left" | ||
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|Please note, while those are considered (mostly) clean, they are not clean enough to be used as carrier for transport of wafers between RCA and furnace or between furnaces. | |||
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New, clean single wafer carriers can be found in the gowning area in the metal cage. Please contact DTU Nanolab personnel for help, if the stock is low. An empty wafer box placed on top of the B1 cage is considered clean as well. Those wafer boxes can be used to store wafers from RCA to furnace or between furnaces. | New, clean single wafer carriers can be found in the gowning area in the metal cage. Please contact DTU Nanolab personnel for help, if the stock is low. An empty wafer box placed on top of the B1 cage is considered clean as well. Those wafer boxes can be used to store wafers from RCA to furnace or between furnaces. | ||