Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions
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Nickel deposition is tested occasionally, around 1 time per year in each machine. Let us know if you notice any problems or would like an extra test of the material. | |||
'''LabManager links to procedures and data''' (require login): | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the E-beam Evaporator (Temescal)]<br> | ||
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*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=511 QC procedure for the E-beam Evaporator (10-pockets)]<br> | ||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br> | *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=511 The newest QC data for the E-beam Evaporator (10-pockets)]<br> | ||
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! QC Recipe: | ! QC Recipe: | ||
! Standard recipes/Ni | ! Standard recipes/Ni | ||
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|Pressure | |Pressure | ||
|Below 1*10<sup>-6</sup> mbar | |Below 1*10<sup>-6</sup> mbar | ||
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{| border="2" cellspacing="1" cellpadding="2" align=" | {| border="2" cellspacing="1" cellpadding="2" align="left" style="width:400px" | ||
!QC limits | !QC limits | ||
!Both E-beam Evaporators | !Both E-beam Evaporators | ||
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Thickness is measured in 5 points with a stylus profiler (usually DektakXT). <br> | Thickness is measured in 5 points with a stylus profiler (usually DektakXT). <br> | ||
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