Specific Process Knowledge/Thin film deposition/Deposition of Chromium: Difference between revisions
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[[Specific_Process_Knowledge/Thin_film_deposition/Lesker/Stress_dependence_on_sputter_parameters_in_the_Lesker_sputter_system#Cr:_High_tensile_stress|Stress in sputtered Cr films]] - ''Extremely high tensile stress in Cr films deposited at high temperature'' | [[Specific_Process_Knowledge/Thin_film_deposition/Lesker/Stress_dependence_on_sputter_parameters_in_the_Lesker_sputter_system#Cr:_High_tensile_stress|Stress in sputtered Cr films]] - ''Extremely high tensile stress in Cr films deposited at high temperature'' | ||
[[Specific Process Knowledge/Thin film deposition/Deposition of Chromium/Roughness of Chromium|Roughness of Chromium]] - Settings and roughness measurements | |||
== Chromium deposition == | == Chromium deposition == | ||