Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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Silver can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | Silver can be deposited by e-beam evaporation, by sputtering and by thermal evaporation. In the chart below you can compare the different methods on the different deposition equipment. | ||
== Sputter deposition of | == Sputter deposition of silver == | ||
* [[Specific Process Knowledge/Thin film deposition/Lesker |Sputter deposition of Silver in Lesker]]. | * [[Specific Process Knowledge/Thin film deposition/Lesker |Sputter deposition of Silver in Lesker]]. | ||
== Thermal deposition of Silver == | == Thermal deposition of Silver == | ||