Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Image:DRIE-Pegasus. | [[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]] | ||
==The Bosch process in the DRIE-Pegasus== | ==The Bosch process in the DRIE-Pegasus== | ||