Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

Jml (talk | contribs)
No edit summary
Jml (talk | contribs)
No edit summary
Line 1: Line 1:
[[Image:DRIE-Pegasus.JPG‎ |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]]
[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]]


==The Bosch process in the DRIE-Pegasus==
==The Bosch process in the DRIE-Pegasus==