Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions
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|style="background:LightGrey; color:black"|Batch size | |style="background:LightGrey; color:black"|Batch size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Up to 8" wafer | *Up to 1 x 6 " or 8" wafer | ||
* | *Up to 3 x 4" wafers | ||
*Many smaller pieces | |||
*Deposition on one side of the substrate | *Deposition on one side of the substrate | ||
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