Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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== Processing options on the Pegasus == | == Processing options on the Pegasus == | ||
The Pegasus has a lot of advanced processing options. | |||
# '''Multiplexing''': As described above, the multiplexed Bosch process may have the etch or passivation cycle each split into three separate phases: Delay, Boost and Main. | |||
# '''Ramping''':Using the ramp option one can change process parameters linearly over the course of each processing step. | |||
# '''Process steps''': Add any number of processing steps to make one continuous process. | |||
This gives an infinite process parameter space.... | |||
===[[Advanced_Silicon_Etcher_-_Pegasus|Details on DRIE-Pegasus]]=== | ===[[Advanced_Silicon_Etcher_-_Pegasus|Details on DRIE-Pegasus]]=== | ||