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Specific Process Knowledge/Thin film deposition/Deposition of Titanium: Difference between revisions

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|1 Å/s to 10Å/s
|1 Å/s to 10Å/s
|few Å/s to 15Å/s
|few Å/s to 15Å/s
|Depending on process parameters, see [[Sputtering of Ti in Wordentec|here]].
|Depending on process parameters
|Depending on process parameters, about 1 Å/s.
|Depending on process parameters, about 1 Å/s.
|Depending on process parameters
|Depending on process parameters
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