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!C-1
!C-1
|In the corridor, on the wall
|In the corridor, on the wall
|55 808
|4525 55808
|-
|-


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!D-1
!D-1
|In the gowning area (entrance room)
|In the gowning area (entrance room)
|55 703
|4525 55703
|-
|-


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!D-3
!D-3
|At the KOH
|At the KOH
|55 940
|4525 55940
|-
|-


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!E-1
!E-1
|By the e-beam computers
|By the e-beam computers
|55 943
|4525 55943
|-
|-


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!E-5/E-4
!E-5/E-4
|By the MLAs in E-5, by mask aligner in E-4
|By the MLAs in E-5, by mask aligner in E-4
|55 946
|4525 55946
|-
|-


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!E-6
!E-6
|Furnace 6"
|Furnace 6"
|55 948
|4525 55948
|-
|-
|-
|-
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!F-1
!F-1
|III-V growth
|III-V growth
|55 949
|4525 55949
|-
|-


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!F-2
!F-2
|To the right of the XRD and Ellipsometer
|To the right of the XRD and Ellipsometer
|55 941
|4525 55941
|-
|-
|-
|-
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!F-3
!F-3
|DUV Stepper
|DUV Stepper
|55 947
|4525 55947
|-
|-


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!Basement 901
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|55 812
|4525 55812
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Basement 904
!Basement 904
|To the right of the AFM
|To the right of the AFM
|55 813
|4525 55813
|-
|-
|}
|}

Revision as of 21:00, 17 June 2025

The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

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DTU Nanolab - Building 346/347

Building 346 (cleanroom), Photo: DTU Nanolab

DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.

Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).

Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.

Building 346:

  • Ground: Cleanroom
  • First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
  • Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)


Building 347:

  • Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
  • First Floor: Offices, Kantine
  • Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)



Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.


Cleanroom (Ground Floor in B346) - Layout and Contacts

Drawing: DTU CAS Digital
Room number Location Phone number
A-1 At III-V RIE 4525 55804
Ax2 At the Lesker 4525 55815
A-5 In the corner near the furnace/plasma asher 4525 55803
B-1 In the corridor, on the wall 4525 55806
C-1 In the corridor, on the wall 4525 55808
D-1 In the gowning area (entrance room) 4525 55703
D-3 At the KOH 4525 55940
E-1 By the e-beam computers 4525 55943
E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 4525 55946
E-6 Furnace 6" 4525 55948
F-1 III-V growth 4525 55949
F-2 To the right of the XRD and Ellipsometer 4525 55941
F-3 DUV Stepper 4525 55947
Basement 901 Hot Embosser, XRD RotAnode, Laser Micromachining Tool 4525 55812
Basement 904 To the right of the AFM 4525 55813


Basement Labs (Basement in B346) - Layout and Contacts

Drawing: DTU CAS Digital




PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts

Drawing: DTU CAS Digital (modified on 21/05/2025)