LabAdviser/346: Difference between revisions
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!Room number | !Room number | ||
!Location | !Location | ||
!Phone number | !Phone number (DTU-prefix: 4525) | ||
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!A-1 | !A-1 | ||
|At III-V RIE | |At III-V RIE | ||
| | |55 804 | ||
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| Line 65: | Line 65: | ||
!Ax2 | !Ax2 | ||
|At the Lesker | |At the Lesker | ||
| | |55 815 | ||
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| Line 72: | Line 72: | ||
!A-5 | !A-5 | ||
|In the corner near the furnace/plasma asher | |In the corner near the furnace/plasma asher | ||
| | |55 803 | ||
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| Line 78: | Line 78: | ||
!B-1 | !B-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |55 806 | ||
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!C-1 | !C-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
| | |55 808 | ||
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| Line 92: | Line 92: | ||
!D-1 | !D-1 | ||
|In the gowning area (entrance room) | |In the gowning area (entrance room) | ||
| | |55 703 | ||
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| Line 99: | Line 99: | ||
!D-3 | !D-3 | ||
|At the KOH | |At the KOH | ||
| | |55 940 | ||
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| Line 106: | Line 106: | ||
!E-1 | !E-1 | ||
|By the e-beam computers | |By the e-beam computers | ||
| | |55 943 | ||
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| Line 113: | Line 113: | ||
!E-5/E-4 | !E-5/E-4 | ||
|By the MLAs in E-5, by mask aligner in E-4 | |By the MLAs in E-5, by mask aligner in E-4 | ||
| | |55 946 | ||
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!E-6 | !E-6 | ||
|Furnace 6" | |Furnace 6" | ||
| | |55 948 | ||
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!F-1 | !F-1 | ||
|III-V growth | |III-V growth | ||
| | |55 949 | ||
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| Line 133: | Line 133: | ||
!F-2 | !F-2 | ||
|To the right of the XRD and Ellipsometer | |To the right of the XRD and Ellipsometer | ||
| | |55 941 | ||
|- | |- | ||
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| Line 139: | Line 139: | ||
!F-3 | !F-3 | ||
|DUV Stepper | |DUV Stepper | ||
| | |55 947 | ||
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!Basement 901 | !Basement 901 | ||
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool | |Hot Embosser, XRD RotAnode, Laser Micromachining Tool | ||
| | |55 812 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Basement 904 | !Basement 904 | ||
|To the right of the AFM | |To the right of the AFM | ||
| | |55 813 | ||
|- | |- | ||
|} | |} | ||
Revision as of 20:56, 17 June 2025
The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.
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DTU Nanolab - Building 346/347
DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.
Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).
Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.
Building 346:
- Ground: Cleanroom
- First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
- Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)
Building 347:
- Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
- First Floor: Offices, Kantine
- Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)
Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.
Cleanroom (Ground Floor in B346) - Layout and Contacts
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Basement Labs (Basement in B346) - Layout and Contacts
PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts
