Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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the etch and deposition cycles may be split into three separate phases, called Delay, Boost and Main. | the etch and deposition cycles may be split into three separate phases, called Delay, Boost and Main. | ||
[[Image:boostdelay4b.jpg | | |||
[[Image:boostdelay4b.jpg |400x400px|thumb|The etch cycle is split into three parts: Boost, Delay and Main]] | |||