Specific Process Knowledge/Thin film deposition/Furnace LPCVD PolySilicon: Difference between revisions
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The A, B, C and E stack furnaces can be controlled either from a touch screen by each furnace or from a furnace computer. The user manual for the furnace computer can be found here: | The A, B, C and E stack furnaces can be controlled either from a touch screen by each furnace or from a furnace computer. The user manual for the furnace computer can be found here: | ||
[[ | [[Media:Furnace computer manual.pdf|Manual for furnace computers for the A, B, C and E stack furnaces]] | ||
==Process information== | ==Process information== | ||