Specific Process Knowledge/Process Flow: Difference between revisions
| Line 129: | Line 129: | ||
== Characterization == | == Characterization == | ||
A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | A crucial and often neglected part of each process flow is the characterization. After critical process steps you might need to analyze and measure the properties of produced structures, layers, materials or entire devices. Characterization techniques help you ensure that the fabricated components meet the required specifications and function correctly. There are many tools and methods available to inspect, analyze and measure the properties of features and materials such as physical, chemical, electrical, and mechanical properties. | ||
| Line 136: | Line 135: | ||
<br> | <br> | ||
<br> | <br> | ||
Below we will try to sum up some of the more typical characterization methods, but for now, please have a look at the [[Specific Process Knowledge/Characterization | '''Characterization''']] page. | |||
<span style="background:#FF2800">THIS PART IS UNDER CONSTRUCTION</span> | |||
=== Surface Toppography === | === Surface Toppography === | ||
''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ''Analysis of form, shape, size, structure, and surface features including surface roughness, f.ex'' | ||
| Line 198: | Line 201: | ||
<br clear="all"> | <br clear="all"> | ||
!--> | !--> | ||
== Special Requirements == | == Special Requirements == | ||